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Asml svg 90S i-line coater/developer svg 90S track


Submitter: j.fleming@modularparts.com (Jillian Fleming)
What Jillian Fleming is selling: Asml svg 90S i-line coater/developer svg 90S track
This listing is for an SVG ASML 90S I-Line Developer Coater Track system. with Millipore Pumps.
Cureently set up for 200MM Wafers
Photo is for actual track that is in our warehouse.
This system is packaged in Heat Treated crates and ready for export.
* 4 Serial Arms and 1 90SE Serial Arm
* Floor is solid SS spill containment with overflow snesors
* Set for Interface with i11/i12 Nikon Stepper
* 6 Stacked Vacuum Bake Ovens
More specs available upon request
Crate 1 140X72X92 5742lbs(Mainframe, Doors, Panels, Remote GP)
Crate 2 57X24X59 384lbs (Inteface)
Crate 3 57X40X85 1003lbs (Chemical Cabinet)
Crate 4 52X33X97 1115lbs (GP Unit)
Crate 5 56X40X85 1057lbs (Temperature Control FTC)
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Contact j.fleming@modularparts.com (Jillian Fleming) for more information. This email will be sent to Jillian Fleming' actual email address.



Asml svg 90S i-line coater/developer svg 90S track Asml svg 90S i-line coater/developer svg 90S track Asml svg 90S i-line coater/developer svg 90S track